About: http://webisa.webdatacommons.org/200961541

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The top insulating layer and the dielectric sidewall spacer may be formed of a material such as silicontoxynitride or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com