About: http://webisa.webdatacommons.org/200969687

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon oxide layer is initially formed under conditions including a relatively low ratio of silicon-containing gas:oxidizing gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com