About: http://webisa.webdatacommons.org/200991148

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These tantalum process deposits are difficult to remove because cleaning solutions suitable for their removal are also frequently reactive with other metals, such as titanium, that are used to form chamber components.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com