About: http://webisa.webdatacommons.org/201160809

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectrics employed to fill those gaps will often be a silicon oxide such as silicon dioxide, silicon oxynitride, silicon oxyfluoride, and doped variants of each of these, or even or carbon doped low-k materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com