About: http://webisa.webdatacommons.org/201213680

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate insulating layer 215 is formed of an insulating material, such as silicon oxide, silicon nitride or other suitable materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com