About: http://webisa.webdatacommons.org/201239397

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The capping layer may be formed using any of a variety of methods known to those of skill in the art such as thermally growing the layer, sputtering, evaporation, and plasma enhanced chemical vapor deposition (PECVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr