About: http://webisa.webdatacommons.org/201296589

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The machine-readable medium can be configured so as to cause a machine, such as an apparatus described herein, to operate in a specific and predefined manner to perform the functions related to photomask modification.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com