| http://www.w3.org/ns/prov#value | - semiconductor device, and further, 1.times.10.sup.18 to 5.times.10.sup.20 atoms/cm.sup.3, preferably 1.times.10.sup.19 to 1.times.10.sup.20 atoms/cm.sup.3 of such halogen element as chlorine and fluorine is contained in either one or two of the
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