About: http://webisa.webdatacommons.org/201498759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 1, the substrate processing apparatus 100 includes a processing chamber 102 constituted of an electrically conductive material such as aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com