About: http://webisa.webdatacommons.org/201551110

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Using most conventional equipment, it is most economical to implant using relatively high implant energy, for example about 5 kiloelectron volts (keV) or higher.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com