| http://www.w3.org/ns/prov#value | - Cleaning gas, such as NF3, CF4, SF6, C2F6, CCl4, C2Cl6 or mixtures thereof, is introduced into the remote chamber 40 and activated therein, for example, by microwaves applied within the remote chamber by the microwave generator 185, or by RF energy applied via electrodes or an inductor coil.
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