About: http://webisa.webdatacommons.org/20197511

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, the invention relates to a enhancing the plasma for processing a substrate, most particularly for plasma sputtering a metallic layer on a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com