| http://www.w3.org/ns/prov#value | - Although the apparatus shown in FIG. 8 is similar to that shown in FIG. 3, they are different from each other in that a gas dissolution portion 82 for dissolving gas such as nitrogen, carbon dioxide or the like in deionized water is interposed in a water supplying pipe 80 for supplying deionized water to deionized water supplying nozzle 28 in the apparatus shown in FIG. 8.
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