About: http://webisa.webdatacommons.org/202114331

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is an end view of the support of FIG. 6 with a wafer edge indicia detector for detecting a notch or other indicia to indicate a reference position on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com