About: http://webisa.webdatacommons.org/202116385

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Microstructural features such as grain size, pore size, porosity and defects were observed on sintered Si3N4 specimens after etching with carbon tetra-fluoride plasma.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com