About: http://webisa.webdatacommons.org/202135176

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Pipes and various types of electric circuits for supplying a cool or heat source and a heat transfer gas to the susceptor 4 are arranged in the elevating mechanism 78.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com