About: http://webisa.webdatacommons.org/202136937

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 is a schematic drawing showing that the increased width is maintained throughout the lower portion of the trench using first substitute plasma etching process.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com