About: http://webisa.webdatacommons.org/20216589

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An aspect of the present invention provides a set of four or more scatterometry overlay targets which have been formed on a sample, such as a semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr