About: http://webisa.webdatacommons.org/202184828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a fragmentary cross sectional view of planarization of the layer of insulative material using a conventional chemical mechanical planarization (CMP) process;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com