About: http://webisa.webdatacommons.org/202216936

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Nickel is a metal element which is very high in diffusion constant and degree of solid solution in a silicon film, and therefore is suitable for the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com