About: http://webisa.webdatacommons.org/202369701

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a plan view illustrating one embodiment of the sample stage 9 of the present electrostatic chuck in which a three-phase alternating voltage is applied (n=3).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com