About: http://webisa.webdatacommons.org/202394866

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a timing chart illustrating several aspects of methods for depositing materials onto micro-device workpieces in accordance with embodiments of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com