About: http://webisa.webdatacommons.org/202440539

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A removal profile of a polishing process, which, as described, is a manner in which the polishing process removes material, is different from a thickness profile of a layer, which is the shape of a cross section of the layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com