About: http://webisa.webdatacommons.org/202570737

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	result, there is a problem in that the dilated wiring pattern prevents the improvement of the integration density of the semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com