About: http://webisa.webdatacommons.org/202942036

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that the first interlayer insulating film 9134 is an inorganic insulating film, and that impurities such as carbon in the second interlayer insulating film 9135 can be prevented from entering the island 9128.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com