| http://www.w3.org/ns/prov#value | - For example, metals such as Si, SiC, Si3N4, Al203, and HfO2 that is referred to as a high-k material and has been attracting attention in recent years as a material with high permittivity available to the shrinkage of a semiconductor are suitably selected and used as the materials 81 a and 81 b.
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