| http://www.w3.org/ns/prov#value | - Note that when the film is oxidized by plasma treatment, the plasma treatment is performed under an oxygen atmosphere (for example, under an atmosphere including oxygen (O2) and a rare gas (including at least one of He, Ne, Ar, Kr, and Xe), under an atmosphere including oxygen, hydrogen (H2), and a rare gas, or under an atmosphere including dinitrogen monoxide and a rare gas).
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