About: http://webisa.webdatacommons.org/203080277

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Consequently, in addition to involving both precise control of the depth and location of the irradiation, the process is particularly suitable for very thin polymer films having a thickness of about 50-10,000 ???.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com