About: http://webisa.webdatacommons.org/203093464

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, other materials may also be used, for example a barrier material with a low dielectric constant k (BLOK???Barrier low k).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com