About: http://webisa.webdatacommons.org/203326567

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As one technique for solving the problem, known is a method of using a crystalline silicon film as the silicon film constituting the active layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com