About: http://webisa.webdatacommons.org/203410581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interface between high-k material grains and the underlying conductor, particularly silicon, is not as greatly affected by the oxidation process, which is carefully selected to avoid excessive oxidation beneath the grain boundaries.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca