PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The dielectric layer may be SiO2 deposited by chemical vapor deposition (CVD) or may be other materials deposited by CVD, sputtering or other techniques.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com