About: http://webisa.webdatacommons.org/203581649

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The polymer employed in the present invention includes hydrocarbons, fluorinated hydrocarbons, organosilicates, silsesquioxanes, and other like polymers that have a low-k or can be converted into a low-k material upon further treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au