About: http://webisa.webdatacommons.org/203705424

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The parameters can be categorized into six groups including degree of vacuum, inert gas concentration, temperature, voltage, electric current, and power.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com