About: http://webisa.webdatacommons.org/203767503

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating film 2610 is formed of an insulating material such as silicon oxide, silicon nitride, silicon oxynitride (SiOxNy, where x>y), or silicon nitride oxide (SiNxOy, where x>y) by a CVD method, a sputtering method, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es