About: http://webisa.webdatacommons.org/203858460

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention can be implemented in many different types of apparatus, such as chemical vapor deposition (CVD) reactors and spin-coating systems.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca