About: http://webisa.webdatacommons.org/203882781

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method illustrated in FIGS. 11A and 11B is a method of repeatedly carrying out a process of keeping the particle beam at a certain dot position 31 and thereafter moving it to a next dot position 31 to keep the particle beam thereat.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com