About: http://webisa.webdatacommons.org/203894495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, it has been determined that linewidth control problems can arise due to light scattering and reflection from the substrate-underlay interface during exposure of the photoresist imaging layer to radiation such as ultraviolet light.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com