About: http://webisa.webdatacommons.org/203979527

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The vacuum plasma processor of claim 19 wherein each substantially coaxial portion has an extent of about 360???/N, where N is an integer greater than 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com