About: http://webisa.webdatacommons.org/204065542

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention generally relates to new and improved polyamic acid/imide microlithographic compositions, their method of manufacture, and particularly their use in a novel concurrent wet-development and improved lift-off process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca