About: http://webisa.webdatacommons.org/204067756

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The filler should therefore be free of heavy metals or other constituents which may cause contamination of substrates being processed within the chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com