About: http://webisa.webdatacommons.org/204099413

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The optical components, such as the multilayer mirror M, the mask MA and detectors, are provided with a thinner cap layer 10, for example less than 5 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com