About: http://webisa.webdatacommons.org/204125295

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method involves first forming a sacrificial layer comprising an oxide, nitride, or other like material, on the surface of a semiconducting substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es