About: http://webisa.webdatacommons.org/204203701

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This embodiment differs from the first embodiment by- the provision of a lower electrode 311 whose composition includes a refractory metal such as Pt, Mo, Ti, W, Ta, or Ni, and/or a refractory metal silicide of Pt, Mo, Ti, W, Ta, or Ni.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es