About: http://webisa.webdatacommons.org/204250224

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The stacked semiconductor device as claimed in claim 4, wherein the first semiconductor chip is a semiconductor chip nearest to the interposer substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com