About: http://webisa.webdatacommons.org/204282311

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second side 216 of the substrate 212 can be thinned by grinding, dry etching, chemical etching, chemical polishing, CMP, or other suitable processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com