About: http://webisa.webdatacommons.org/204423647

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The optical-path-length varying layer 30 is a material transparent to the illuminating light used in pattern transfer and varies, in a predetermined amount, the optical path length of the light transmitted through the second pattern P2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au