About: http://webisa.webdatacommons.org/204667717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, there is a problem in that the reaction product may be not only adhered to an object to be processed, to decrease the yield, but it may also be adhered to the inner surface of the processing container and the upper electrode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com