About: http://webisa.webdatacommons.org/205088387

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Parameters such as gas composition, temperature, and pressure had been optimized to prepare the best quality thin films.
http://www.w3.org/ns/prov#wasQuotedFrom	nsti.org