About: http://webisa.webdatacommons.org/205232302

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It should be understood, however, that any number of other types of scenarios, steps, and groupings of wafers are also contemplated for use with, and in environments of, the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au